The M.R.D.L is presently a 7,200 square foot facility. This facility consists of a class 10,000 Hybrids facility, class 1,000 Analysis facility, class 100 Thin Film Deposition facility, class 100 Semiconductor Fabrication facility, two class 100 Dark Rooms.

This page is best viewed in Internet Explorer. This page will function improperly if the browser is using java filters.



Microelectronics Research and Development Laboratory
Electrical Engineering Department
Northern Illinois University
Webmaster